Nonlinear optical effects in the UV range
A XeCl laser with high-quality output radiation was created using the effects of phase conjugation and pulse compression at induced Mandelshtam-Brillouin scattering in compressed gases. Parameters of the output radiation are the following:
Ц wavelength ~ 308 nm;
The laser is used for investigation of nonlinear optical effects in the UV range. Primary attention is focused on studying the influence of several coherent beams on substance. The action of several beams may produce large ensembles of submicron periodic structures with a period less than 200 nm and the size of each region less than 100 nm. Optimal conditions for obtaining such structures on quartz, semiconductors, polymers, metal films, and other materials were found. The technique is promising for application in nanosize optoelectonics, optical-fiber and planar devices, and semiconductor technology.
Fig. 1. Photoresist on irradiation by four beams and development.
Image from atomic-force microscope and the cross-section labeled by the bar.